直播时间：2025年4月25日（周五）20:00-21:30

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北京时间2025年4月25日晚八点，iCANX Talks 第224期邀请到了剑桥大学教授Ashwin A. seshia作为主讲嘉宾，国防科技大学副教授周鑫、西北工业大学教授张和民、中国科学院空天信息研究院传感器技术国家重点实验室研究员邹旭东、北京大学教授张海霞担任研讨嘉宾，北京大学副教授卢奕鹏担任主持人。这将是一场汇聚顶尖学者的盛会，共同探讨前沿科技与学术挑战！更多精彩，敬请期待！

【嘉宾介绍】

Ashwin A. Seshia ‍

剑桥大学

Silicon Micromachined Resonant Transducers for Precision Measurements

【Abstract】

Micromachined silicon resonators have been employed for the sensitive transduction of physical quantities such as force, displacement, and mass. The varied applications of these transducers include physical sensors, gravimetric sensing, atomic force microscopy, and mass spectrometry. In this talk, I will introduce the principles and historical development of silicon micromachined resonant transducers and their applications in the context of sensing. The readout is based on tracking changes in the resonance characteristics of one or more transducers (response amplitudes, phases, or frequencies) in response to changes in an external measurand. Transduction principles based on tracking eigenstate variations in weakly coupled resonators and leveraging other dynamical effects will also be discussed. Applications of such transducers will be discussed including to strain measurements in built infrastructure systems and terrestrial gravimetry.

微加工硅谐振器已被用于对力、位移和质量等物理量进行灵敏的信号转换。这些转换器的应用范围广泛，包括物理传感器、质量传感、原子力显微镜和质谱分析等。在这次演讲中，我将介绍硅微加工谐振转换器的原理及其在传感领域的历史发展，并讨论它们的应用。信号读出是基于跟踪一个或多个转换器的谐振特性（响应幅度、相位或频率）的变化，以响应外部被测量的变化。还将讨论基于跟踪弱耦合谐振器本征态变化以及其他动态效应的转换原理和这些转换器的应用，包括在建筑基础设施系统中的应变测量和陆地重力测量。

【Biography】

Ashwin A. Seshia is a Professor of Microsystems Technology at Cambridge University and Institute Chair Professor in Electrical Engineering at IIT Bombay. He received his B.Tech. degree in Engineering Physics from IIT Bombay in 1996, and the MS and PhD degrees in Electrical Engineering and Computer Science from the University of California, Berkeley in 1999 and 2002 respectively. He has held visiting positions at Stanford University, the University of California, Berkeley, IIT Bombay, and UCLA.His research interests include microelectromechanical systems (MEMS) design, particularly in relation to sensors and sensor systems. Foundational research and translational contributions include to the field of resonant and mode-localized sensing, and towards the development of frequency modulated sensors, micromachined vibrating beam gravimeters, and vibration energy harvesting. Ashwin received the 2018 IEEE Sensors Technical Achievement Award (Advanced Career - Sensor Systems) "for pioneering contributions to resonant microsystems with application to sub-surface density contrast imaging and energy harvesting systems". He was appointed a distinguished lecturer of the IEEE Sensors Council for the period 2020-2022. Ashwin has acted in numerous service and leadership roles for the MEMS, sensors, and frequency control technical communities, and is currently serving on the International Steering Committee for the IEEE MEMS Conference and as co-General Chair of IEEE MEMS 2026. He has previously served on the editorial boards of the Journal of Micromechanics and Microengineering (2015-2016), the IEEE Transactions on Nanotechnology (2015-2017), the IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control (2011-2021), and IEEE Journal of Microelectromechanical Systems (2009-2023).Ashwin is a Chartered Engineer (CEng), Fellow of the Institute of Physics (IOP), Fellow of the Institution for Engineering and Technology (IET) and a Fellow of the Institute of Electrical and Electronics Engineers (IEEE). He was elected a Fellow of the Royal Academy of Engineering (FREng) in 2023.

Ashwin A. Seshia 是剑桥大学微系统技术教授和印度理工学院孟买分校电气工程学院主席教授。他于1996年在印度理工学院孟买分校获得工程物理学士学位，1999年和2002年分别在美国加州大学伯克利分校获得电气工程与计算机科学硕士和博士学位。他曾担任斯坦福大学、加州大学伯克利分校、印度理工学院孟买分校和加州大学洛杉矶分校的访问学者。 他的研究兴趣包括微机电系统（MEMS）设计，特别是在传感器和传感器系统方面。他的基础研究和转化贡献包括在谐振和模态局域传感领域的工作，以及频率调制传感器、微加工振动梁重力仪和振动能量收集技术的开发。Ashwin 因“在谐振微系统领域的开创性贡献，特别是在亚表面密度对比成像和能量收集系统中的应用”获得了2018年IEEE传感器技术成就奖（高级职业 - 传感器系统）。他于2020-2022年被任命为IEEE传感器委员会杰出讲师。Ashwin 在MEMS、传感器和频率控制技术社区中担任了众多服务和领导角色，目前担任IEEE MEMS会议国际指导委员会委员和2026年IEEE MEMS大会共同主席。他此前曾担任《微机械学与微工程杂志》（2015-2016年）、《IEEE纳米技术学报》（2015-2017年）、《IEEE超声学、铁电学与频率控制学报》（2011-2021年）和《IEEE微机电系统杂志》（2009-2023年）的编委。 Ashwin 是特许工程师（CEng），英国物理学会（IOP）会士、工程技术学会（IET）会士和电气与电子工程师学会（IEEE）会士。2023年，他被选为英国皇家工程院院士（FREng）。